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Process Chemical and Specialty Gases


Wafer/IC/LCD Process Chemical
(H2SO4,H2O2, IPA, NH4OH…)

CVD Precursor
TDMAT/TiCl4/TMA/TEASAT/InI/InF3/InCl3/High-K/Low-K Material
TEOS,TMB,TEB,TMPO,TEPO,TDMAT,TiCl4等

Polyimide
Positive Photosensitive Wafer Coating
SUMIRESIN EXCEL CRC-8300 series

Specialty Gases
NH3, N2O, NO, CO, B2H6, SiH4, SiH2Cl2, SiHCL3,Si2H6, NF3, WF6等


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