1. 矽晶圓 Silicon wafer

Diameter 6”-12” (150mm- 300mm)

Type/Dopant   P/B, N/Ph,

Resistivity        <1 to >1,00 Ω-cm

Thickness     600-750 +/- 25μm

Particle Count up to ≤ 100 @ ≥ 0.05μm

Polished   Single side or double side polished

Etched     Single side or double side Etched

2. 晶圓鍍膜 Film Wafer

Oxide wafer

金屬鍍膜Wafer metallization: Al, Al-Cu, Cu, Ti, Cr, Mo, Ni