CVD Precursor
CVD Precursor(化學氣相沉積材料)
TDMAT/TiCl4/TMA/TEASAT/InI/InF3/InCl3/High-K/Low-K Material
TEOS,TMB,TEB,TMPO,TEPO,TDMAT,TiCl4等
TDMAT/TiCl4/TMA/TEASAT/InI/InF3/InCl3/High-K/Low-K Material
TEOS,TMB,TEB,TMPO,TEPO,TDMAT,TiCl4等
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